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Liquid Delivery System with Vapor Control


The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapor generation system consists of a liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 0,25-1200 g/h resulting in saturated vapor flows of 50 sccm up to 100 SLM. This vaporizer system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporised successfully.

The evaporation system is fast, accurate, highly repeatable and efficient.

CEM Evaporation systemCEM model W-202ACEM model W-303B
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