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Competence in vacuum

For more than 30 years Bronkhorst High-Tech manufactures high quality product for gas and liquid measurement and control for Semiconductor and Vacuum Technology applications.

All of our product series distinguish themselves by their reliability, long term stability, high precision and excellent price-performance ratio. The continuous drive for innovation and the close working links and collaborations with customers resulted in the most extensive product range of thermal mass flow meters/controllers and a unique series of low flow Coriolis Mass Flow Meters / Controllers for liquids and gases.

The Bronkhorst organization features a worldwide network of Sales & Service offices with 24/7 support for our customers. Production, assembly and calibration can also be performed under cleanroom conditions.

In Vacuum Technology our Mass Flow Meters and Controllers, as well as our Pressure Controllers and Vapor Delivery Systems, are used for coating and layer deposition on e.g.

  • Solar cells
  • Flat screens
  • Architectural glass
  • Optical lenses
  • Glass fibers
  • Silicon chips
  • Capacitors
  • Hard drives
  • Foils
  • Crystals

We have gathered extensive experience with typical vacuum processes, e.g.

  • Sputtering
  • CVD
  • ALD
  • Plasma Etching
  • Ion implantation
  • PVD, and many more

Please find below a short form overview of our instruments, commonly used in this market and use the hyperlinks for detailed information about these products.

EL-FLOW Select

EL-FLOW Select series

Universal Thermal Mass Flow Meters (MFM’s) and Mass Flow Controllers (MFC’s) with analog or digital output. Multi-gas / multi-range functionality available as an option. Elastomer sealed.

Flow ranges from 0-0,7 mln/min up to 0-1670 ln/min air-equivalent


FLOW-SMS series

Compact mounting rail system with one or more mass flow or pressure sensor modules that can be combined with control valves, shut-off valves, mixing chambers, filters or any other functional module as per customer's request. The specifications are open for discussion.

VAPOR delivery systems


Controlled Evaporation Mixing. Precursor fluids are accurately controlled, mixed with a carrier gas flow and subsequently evaporated in a temperature controled heat-exchanger. This vapor delivery system is an excellent alternative for conventional bubbler systems.

Product downloads



mini CORI-FLOW series

Compact Coriolis Mass Flow Meter / Mass Flow Controller for liquids and gases. Both analog and digital output. Housing according to IP65 classification. World's smallest, lowest flow Coriolis Mass Flow Controller !

Flow ranges from 0-20 g/h up to 0-30 kg/h.

EL-PRESS Metal Sealed

EL-PRESS Metal Sealed series

Digital Pressure Meters and Controllers for use in high-purity / vacuum applications, e.g. semiconductor industry. With 1/4" VCR connections.
Pressure ranges from 0-100 mbar up to 0-64 bar.

EL-FLOW Metal Sealed

EL-FLOW Metal Sealed series

Digital Thermal Mass Flow Meters and Controllers for use in high-purity / vacuum applications, e.g. semiconductor industry. Metal sealed, with 1/4" VCR connections.

Flow ranges from 0-5 mln/min up to 0-100 ln/min air-equivalent.

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