Liquid Delivery System with Vapor Control

CEM-Technology: Controlled Evaporation Mixing

The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapor generation system consists of a (thermal or Coriolis) liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 0,25-1200 g/h resulting in saturated vapor flows of 50 sccm up to 100 SLM. This vaporizer system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporised successfully.

VDM-Series: Vapor Delivery Modules

Based on the above CEM-technology as described above, Bronkhorst designed a new series of Vapor Delivery Modules. These compact sub-systems incorporate the components of the CEM-System and more! Besides gas and liquid flow controllers and the temperature controlled evaporator, the VDM-Series feature integrated power supply with display (1.8” TFT) and control functions. As an option, the unit offers local or remote trace heating temperature control. The compact, ‘plug and work’ module can generate (saturated) vapor flows within the range of 100 sccm up to 10 SLM. It can be applied for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.

Bronkhorst's evaporation technology is fast, accurate, highly repeatable and efficient.

  • Features
  • Applications
  • Capacities
  • Documentation

Features

  • Accurately controlled gas/liquid mixture (mass flow)
  • Fast response
  • High reproducibility
  • Handles water, solvents, liquid mixtures
  • Very stable vapor flow
  • Flexible selection of gas/liquid ratio
  • Lower working temperature than conventional system
  • Sorption experiments or processes in pharma or food applications 

Applications

  • CVD (Chemical Vapor Deposition), e.g. for hardening, thin film coating or planarization processes
  • Testing/calibration of analyzers with reference gas vapor concentrations
  • Toxic gas effects on protective clothing
  • Analyzers with reference H2O vapor concentrations
  • Humidification of fuels
  • Anaesthetics

Capacities

Model 

Description             

Max. capacity
(based on water)

Max. capacity

Max. temp.

W-101A 10 W, for µ-FLOW 2 g/h Liquid 4 ln/min Gas 200°C
W-102A 10 W, for LIQUI-FLOW™/ mini CORI-FLOW™ 30 g/h Liquid 4 ln/min Gas 200°C
W-202A 100 W, for LIQUI-FLOW™/ mini CORI-FLOW™ 120 g/h Liquid 10 ln/min Gas 200°C
W-303B 1000 W, for LIQUI-FLOW™/ mini CORI-FLOW™ 1200 g/h Liquid 100 ln/min Gas 200°C
SW-100 10 W, VDM-Series 30 g/h Liquid 4 ln/min Gas 200°C
SW-200 100 W, VDM-Series 120 g/h Liquid 10 ln/min Gas 200°C

Leaflet

For more information see leaflets "CEM Liquid Delivery System" and "VDM Series - Vapor Delivery Modules"

CEM system with Coriolis MFMCEM model W-202AVapor Delivery Module
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