Liquid Delivery System with Vapor Control
CEM-Technology: Controlled Evaporation Mixing
The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapor generation system consists of a (thermal or Coriolis) liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 0,25-1200 g/h resulting in saturated vapor flows of 50 sccm up to 100 SLM. This vaporizer system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporised successfully.
VDM-Series: Vapor Delivery Modules
Based on the above CEM-technology as described above, Bronkhorst designed a new series of Vapor Delivery Modules. These compact sub-systems incorporate the components of the CEM-System and more! Besides gas and liquid flow controllers and the temperature controlled evaporator, the VDM-Series feature integrated power supply with display (1.8” TFT) and control functions. As an option, the unit offers local or remote trace heating temperature control. The compact, ‘plug and work’ module can generate (saturated) vapor flows within the range of 100 sccm up to 10 SLM. It can be applied for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.
Bronkhorst's evaporation technology is fast, accurate, highly repeatable and efficient.