IQ+FLOW
|
Mass Flow Meter (MFM) |
Ranges |
Series IQF-100C | min. 0,2 ... 10 sccm max. 0,1 ... 5 slm |
Series IQFD-100C (downported) |
min. 0,2 ... 10 sccm max. 0,1 ... 5 slm |
Mass Flow Controller (MFC) |
Ranges |
Series IQF-200C | min. 0,2 ... 10 sccm max. 0,1 ... 5 slm |
Series IQFD-200C (downported) |
min. 0,2 ... 10 sccm max. 0,1 ... 5 slm |
Leaflet
For more information see leaflet "IQ+FLOW Micro Solid State Controllers"