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IQ⁺FLOW
Chip-sensor based Mass Flow Meters/Controllers for gases

General

Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSI^TM system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst has developed the IQ⁺FLOW^® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure controllers.

High intrinsic quality, featuring...

• Flow ranges from 0,2...10 sccm up to 0,1...5 slm (Full Scale values)
• Very stable Zero, due to the thermally balanced chip-sensor
• Compact assembly ensures space efficiency
• Economical solution, low cost of ownership
• Fast response, down to 300 msec
• Analog and digital (RS232 / RS485) communication

Customer specific designs

Based on the micro system technology of IQ⁺FLOW^® series, Bronkhorst also offers the possibility to combine functional modules on a compact manifold. See IQ+FLOW manifold solutions

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