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EL-FLOW® Metal Sealed
Gas Mass Flow Meters / Controllers
General
Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst High-Tech
are characterised by their unique, patented metal-to-metal seal construction
with excellent resealing capability. Furthermore they distinguish themselves
by a high surface quality and are therefore especially suitable for meeting
the semiconductor industry requirements as well as other high purity gas
applications. The base blocks of the Mass Flow Meters and Controllers have
1/4" face seal male (VCR) connections.
lowest range 0,12...6 sccm
highest range 1... 50 slm
Todays instruments are equipped with a digital
pc-board, offering high-accuracy, excellent temperature stability and
fast response (settling time t98 down to 500 msec). The latest EL-FLOW®
design features Multi Gas / Multi Range functionality, providing (OEM-)
customers with optimal flexibility and process efficiency. For the convenience
of the customer Bronkhorst provides free and easy to use configuration
software.
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- Features
- Flow capacities
- Documentation
Features
- High accuracy (standard ±0,5% RD plus ±0,1% FS)
- Resealable metal-to-metal outer seal construction (no rings)
- Electropolished wetted parts
- Cleanroom assembled
- Multi Gas / Multi Range functionality
- Analog and digital I/O, with optionally integrated interface to
DeviceNet™, PROFIBUS DP, Modbus, EtherCAT or FLOW-BUS
- Super stable zero (no need for auto-zero circuit)
Flow capacities (based on air)
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Mass Flow Meter (MFM) (MFM)
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Ranges
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| Model F-111CM |
min. 0,1 ... 5 sccm
max. 0,6 ... 100 slm |
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Mass Flow Controller (MFC) (MFC)
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Ranges
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| Model F-201CM |
min. 0,2 ... 10 sccm
max. 0,6 ... 100 slm |
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Vacuum
