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EL-FLOW® Metal Sealed
Gas Mass Flow Meters / Controllers


Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst High-Tech are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1/4" face seal male (VCR) connections.

lowest range 0,12...6 sccm
highest range 1... 50 slm

Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW® design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides free and easy to use configuration software.

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  • Features
  • Flow capacities
  • Documentation


  • High accuracy (standard ±0,5% RD plus ±0,1% FS)
  • Resealable metal-to-metal outer seal construction (no rings) 
  • Electropolished wetted parts
  • Cleanroom assembled
  • Multi Gas / Multi Range functionality
  • Analog and digital I/O, with optionally integrated interface to
    CANopen®, DeviceNet™, PROFIBUS DP, PROFINET, Modbus, EtherCAT or FLOW-BUS
  • Super stable zero (no need for auto-zero circuit)

Flow capacities (based on air)

Mass Flow Meter (MFM) (MFM)


Model F-111CM min. 0,1 ... 5 sccm
max. 0,6 ... 100 slm

Mass Flow Controller (MFC) (MFC)


Model F-201CM min. 0,2 ... 10 sccm
max. 0,6 ... 100 slm

Metal sealed Mass Flow Controller (MFC) model F-201CMMetal sealed Mass Flow Meter model F-111CM
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