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EL-FLOW® Prestige - New Generation
GAS Mass Flow Meters / Mass Flow Controllers


EL-FLOW® Prestige, the latest generation thermal mass flow meters and controllers for gases, represents a truly ground-breaking shift in versatility and user-friendliness. Its principal customer benefits are based upon

  • Further advances in flow-signal processing
  • Highly stable flow control regime virtually impervious to process fluctuations
  • Advanced control valve design
  • An on-board gas conversion model
  • Significantly reduced power consumption
  • A user configurable device with a multitude of additional features and benefits
Lowest range 0.014...0.7 sccm
up to highest range 2...100 slm

The Mass Flow Meter/Controller that adapts to your process

The control performance of EL-FLOW Prestige Mass Flow Controllers is factory adjusted to swiftly respond to setpoint changes, without overshoot. Moreover, the controllers are highly resistant to mechanical shocks and pressure fluctuations, which may be caused by other devices consuming gas from the same source. As an option the MFCs can be tuned for extra fast response (settling times t98% down to 500 msec) or extra smooth control, depending on the requirements of the user’s process. The dynamic behavior can also be tuned on site easily, by adjusting the controller speed settings via FlowTune™, or by using our software tool FlowPlot™. This free tool can also be used for device diagnostics or alarm and counter settings.

Select the I/O options of your preference

Numerous input/output options can be offered through the programmable sub-D 9-pin
connector. In addition to the various analog signal options and the standard RS232
communication, there are such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output. Furthermore Bronkhorst offers various integrated fieldbus options: DeviceNet™, PROFIBUS DP, PROFINET, Modbus RTU/ASCII, EtherCAT® and FLOW-BUS. The latter is an RS485 based fieldbus, specifically designed by Bronkhorst for their mass flow metering and control solutions. For the convenience of customers working with LabVIEW™ (graphical software by National Instruments) Bronkhorst provides a certified plug & play instrument driver for instruments with FLOW-BUS™ interface. More information about digital "multibus" communication.

Reduce your cost of ownership

EL-FLOW Prestige offers high flexibility due to the Multi Gas / Multi Range (MG/MR) functionality. This functionality, now extended to 100 gases, is easily accessible via the FlowTune™ software or PLC; there is no need to disconnect the instrument from your system. Users of EL-FLOW Prestige instruments can rescale their instruments on site, saving time and money for dismounting and recalibration. Furthermore, original equipment manufacturers (OEMs) are able to drastically reduce the variety of spare instruments kept on stock and thus reduce the cost of ownership.

Customized Input/Output configurations

Besides the obvious I/O-options for measured and setpoint values via analog signals, RS232 or fieldbus communication, EL-FLOW Prestige features a programmable pin (pin 5) at the 9-pin sub-D connector for customized I/O configurations. This functionality can be used for advanced operations such as digital frequency/pulse output, alarm output/reset, processing an external setpoint signal, valve purge/close and analog valve output. Some options are specified in the model number identification, however, numerous other settings can be programmed on request.

NEW: Pressure Insensitive Gas Mass Flow Controllers

As an option, an EL-FLOW Prestige instrument can be equipped with an on-board pressure sensor. In combination with an incorporated gas database with physical properties, the instrument automatically compensates for inlet pressure variations. As a result, the accuracy and control stability will not be affected by these pressure changes.

  • Features
  • Applications
  • Flow capacities
  • Documentation & Video


  • High accuracy (standard 0.5% Rd plus 0.1% FS)
  • Rangeability in digital mode up to 1:150
  • Extremely fast and dynamic response
  • Multi-Gas / Multi-Range functionality (100 selectable gases; scalable between 40%-120% or ordered capacity (FS value)
  • Pressure ratings 147 / 940 / 1470 psi (10 / 64 / 100 bar)
  • Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
  • Great variety of customized I/O options
  • User configurable control characteristics
  • Robust metal housing
  • Safety in compliance with IEC 61010-1


  • Analytical/environmental equipment
  • Gas flow monitoring in food, chemical and petrochemical industries
  • Gas consumption measurement in gas distribution systems for internal accounting purposes
  • Detection of gas leakage through objects
  • Semiconductor manufacturing
  • Surface treatment installations

and many more!

Mass Flow Meter (MFM);

PN100 (Pressure rating 1470 psi)


Series FG-110C min. 0.014 ... 0.7 sccm
max. 0.18 ... 9 sccm
Series FG-110CP
Pressure Insensitive
min. 0.014 ... 0.7 sccm
max. 0.18 ... 9 sccm
Series FG-111B min. 0.14 ... 7 sccm
max. 0.4 ... 20 slm
Series FG-111BP
Pressure Insensitive
min. 0.14 ... 7 sccm
max. 0.4 ... 20 slm
Series FG-111AC min. 0.2 ... 10 slm
max. 2 ... 100 slm

Mass Flow Controller (MFC);

PN64 / PN100 (940 / 1470 psi)


Series FG-200CV PN64 min. 0.014 ... 0.7 sccm
max. 0.18 ... 9 sccm
Series FG-200CVP
Pressure Insensitive
PN10 min. 0.014 ... 0.7 sccm
max. 0.18 ... 9 sccm
Series FG-210CV
PN100 min. 0.014 ... 0.7 sccm
max. 0.18 ... 9 sccm
Series FG-210CVP
Pressure Insensitive
PN100 min. 0.014 ... 0.7 sccm
max. 0.18 ... 9 sccm
Series FG-201CV PN64 min. 0.14 ... 7 sccm
max. 0.4 ... 20 slm
Series FG-201CVP
Pressure Insensitive
PN10 min. 0.14 ... 7 sccm
max. 0.4 ... 20 slm
Series FG-211CV PN100 min. 0.14 ... 7 sccm
max. 0.4 ... 20 slm
Series FG-211CVP
Pressure Insensitive
PN100 min. 0.14 ... 7 sccm
max. 0.4 ... 20 slm
Series FG-201AV PN64 min. 0.2 ... 10 slm
max. 2 ... 100 slm
Series FG-211AV PN100 min. 0.2 ... 10 slm
max. 2 ... 100 slm

Mass Flow Controller (MFC)
with integrated shut-off valve

PN10 (Pressure rating 147 psi)


Series FG-201CS min. 0.14 ... 7 sccm
max. 0.4 ... 20 slm
Series FG-201CSP
Pressure Insensitive
min. 0.14 ... 7 sccm
max. 0.4 ... 20 slm


For more info see brochure "EL-FLOW Prestige, World's most versatile mass flow meters/controllers for gases".


Instruction manual
Quick installation guide


EL-FLOW Prestige Thermal Mass Flow Meter / Controller (Principle of operation)
Animated video explaining the principle of operation for the Bronkhorst EL-FLOW® Prestige Thermal Mass Flow Meter/Controller for Gas.

Mass Flow Controller FG-201CV EL-FLOW PrestigeMass Flow Meter FG-110C EL-FLOW PrestigeFG-201CVP Pressure Insensitive Mass Flow Controller
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