Semiconductor and LED lighting industry

Originally, Thermal Mass Flow Meters/Controllers were developped in the 1970's for gas vapor deposition in semiconductor fabrication processes. The Semicon market is still a huge market for suppliers of MFC's like Bronkhorst. By listening to the requirements from this market and introducing new and better products for gas, liquid and vapor delivery, Bronkhorst became a major supplier to the Semicon and LED Lighting Industry. With metal sealed instruments, fast response MFC's, innovative direct liquid injection systems and on-board fieldbus interfaces (PROFIBUS, PROFINET, DeviceNet, Modbus, EtherCAT, etc.) Bronkhorst earned an excellent reputation within this highly advanced and demanding market.

 wafer deposition
GAS LIQUID
PRESSURE VAPOR

 Application Notes & Market Brochures

 

Application Note on Supercritical Gas
(Wafer cleaning using supercritical CO2)
Brochure Semiconductor market
(Ultra) low flow Coriolis competence

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