CEM-System
Liquid Delivery System with Vapor Control
General
The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vaporizer system consists of a liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 0,25-1200 g/h resulting in saturated vapor flows of 50 sccm up to 100 SLM. This vaporizer system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporized successfully.
The vaporizer system is fast, accurate, highly repeatable and efficient.
Features  
- Accurately controlled gas/liquid mixture (mass flow)
- Fast response
- High reproducibility
- Handles water, solvents, liquid mixtures
- Very stable vapor flow
- Flexible selection of gas/liquid ratio
- Lower working temperature than conventional system
Applications
- CVD (Chemical Vapor Deposition), e.g. for hardening or planarization processes
- Testing/calibration of analyzers with reference gas vapor concentrations
- Toxic gas effects on protective clothing
- Analyzers with reference H2O vapor concentrations
- Humidification of fuels
- Anaesthetics
Capacities
Model |
Description |
Max. liquid capacity
(based on water) |
Max. gas capacity |
Max. temp. |
| W-101A |
10 W, for µ-FLOW |
2 g/h liquid |
4 SLM gas |
200°C |
| W-102A |
10 W, for LIQUI-FLOW® |
30 g/h liquid |
4 SLM gas |
200°C |
| W-202A |
100 W, for LIQUI-FLOW® |
120 g/h liquid |
10 SLM gas |
200°C
|
| W-303A |
1000 W, for LIQUI-FLOW® |
1200 g/h liquid |
100 SLM gas |
200°C |
Leaflet
For more information see leaflet "CEM Liquid Delivery System"
|
