IQ FLOW Chip-sensor based
Mass Flow Meters/Controllers for gases
General
Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSITM system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst High-Tech has developed the IQ FLOW mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure controllers.
High intrinsic quality, featuring...
- Flow ranges from 20 mln/min up to 2 ln/min (Full Scale values)
- Very stable Zero, due to the thermally balanced chip-sensor
- Compact assembly ensures space efficiency
- Economical solution, low cost of ownership
- Fast response, down to 150 msec
- Analog and digital (RS232, SPI, I2C) communication
Customer specific designs
Based on the micro system technology of IQ FLOW series, Bronkhorst High-Tech also offers the possibility to combine functional modules on a compact manifold. See IQ FLOW manifold solutions
Analytical applications
Examples of analytical applications based on the ultra compact modules with a footprint of 0.75" are:
- Flow - Pressure control at the injector side of a GC
- Flow control at the detector side of a GC or HPLC
- Flow control in an FID detector
Leaflet
For more information seeleaflet IQ FLOW micro solid state controllers
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Mass Flow Controller
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