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EL-FLOW® Select - Laboratory style
GAS Mass Flow Meters / Mass Flow Controllers

General

EL-FLOW® Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a 'laboratory style' pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows from:

  lowest range 0,014...0,7 mln/min
  up to highest range 8...1670 ln/min

The control valve design of the mass flow controller distinguishes itself from competitive designs by its truly modular construction and its ability to be field replaced or changed by the user without any adjustment. The standard valve is normally closed and is available up to Kv-values of 1.5. Normally opened valves can also be supplied. Patented constructions enable us to handle high flows and/or pressures at differential pressures up to 400 bar in the EL-FLOW® program, a capability which is unique in the market place.

NEW: EL-FLOW Select Digital Mass Flow Meters/Controllers

These new instruments with Multi Gas / Multi Range functionality offer greater flexibility for user selection of both flow ranges and gas types, maintaining high accuracy and turndown range for measurement and control. Thanks to this feature users of the Select series can rescale their instruments on site, saving time (and money) for mounting and dismounting. For the convenience of the user, Bronkhorst High-Tech has developed an easy-to-use software tool called "FlowTune" for changing the configuration of Select instruments with activated Multi Fluid Multi Range option.

Digital = Standard

With the introduction of the Select series, all EL-FLOW instruments are equipped with a digital pc-board, feauturing self-diagnostics, alarm and counter functions, digital communication and remotely adjustable control settings. Digital instruments from Bronkhorst High-Tech offer great flexibility thanks to the "multibus" concept, whereby the instruments can be equipped with an on-board interface with DeviceNetTM, Profibus-DP®, Modbus or FLOW-BUS protocol. More information about digital "multibus" communication.

Features

  • Multi-Gas / Multi-Range: freely programmable ranges and gas types
  • High accuracy (standard 0,8% Rd plus 0,2% FS;
    on request 0,5% Rd plus 0,1% FS)
  • Fast response (down to 200 msec), excellent repeatability
  • Pressure ratings up to 100 bar (Multi-Gas / Multi-Range functionality up to 10 bar)
  • Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
  • Electro-chemical polishing of all surfaces
  • Compact, modular construction
  • Metal sealed and/or down-ported versions available

Applications

  • Analytical/environmental equipment
  • Gas flow monitoring in food, chemical and petrochemical industries
  • Gas consumption measurement in gas distribution systems for internal accounting purposes
  • Detection of gas leakage through objects
  • Semiconductor manufacturing
  • Surface treatment installations

Flow capacities (based on air)

Mass Flow Meters (MFM);
PN100 (pressure rating
100 bar)
Ranges
Series F-110C min. 0,014 ... 0,7 mln/min
max. 0,06 ... 9 mln/min
Series F-111B min. 0,16 ... 8 mln/min
max. 0,16 ... 25 ln/min
Series F-111CM (metal sealed) min. 0,1 ... 5 mln/min
max. 0,6 ... 100 ln/min
Series F-111AC min. 0,4 ... 20 ln/min
max. 0,6 ... 100 ln/min
Series F-112AC min. 0,8 ... 40 ln/min
max. 1,4 ... 250 ln/min
Series F-113AC min. 4 ... 200 ln/min
max. 8 ... 1670 ln/min

Mass Flow Controllers (MFC);
PN64 / PN100
Ranges
Series F-200CV / F-210CV 1) min. 0,014 ... 0,7 mln/min
max. 0,06 ... 9 mln/min
Series F-201CV / F-211CV 1)
min. 0,16 ... 8 mln/min
max. 0,16 ... 25 ln/min
Series F-201CM (metal sealed) 1) min. 0,2 ... 10 mln/min
max. 0,6 ... 100 ln/min
Series F-201AV / F-211AV 1) min. 0,4 ... 20 ln/min
max. 0,6 ... 100 ln/min
Series F-202AV / F-212AV 2) min. 0,8 ... 40 ln/min
max. 1,4 ... 250 ln/min
Series F-203AV / F-213AV 2) min. 4 ... 200 ln/min
max. 8 ... 1670 ln/min

1) with small type of valve for normal applications
2) with pilot-operated valve for high flow applications

Brochures

For more info see leaflet "EL-FLOW thermal mass flow meters/controllers for gases" and the new leaflet describing the Mass Flow Select series

F-201CV EL-FLOW Select Mass Flow Controller

Bronkhorst USA Inc., 57 South Commerce Way, Suite 120, Bethlehem, PA18017, Tel +1-610-866-6750
sales@bronkhorstusa.com
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