Pressure and Mass Flow Controller technology for standardised modular platform systems

Bronkhorst High-Tech manufactures a wide range of Mass Flow Controllers (MFC's) and Pressure Controllers (EPC's) with numerous mounting options that include, but are not limited to, compression type fittings, vacuum seal fittings, flange and wafer mounting, and other specialist connections. In response to the unique demands of many of our OEM customers we have further strengthened our supply capability with surface mount technology systems. The majority of our produced systems can be sub-divided by conformance to the following International Standards :

• IGCII system - metal sealed, 1-½", conforming to SEMI PR3-0699E
  
• OMUG system - metal sealed, 1-1/8", conforming OMUG draft document OM-1 Rev.A
  
• MPC / MS3 system - elastomer sealed, 1-½", conforming ANSI/ISA-76.00.02-2002 (NeSSI)

In addition, however, our wealth of experience with modular platform technology ensures that we are able to be highly flexible in our approach towards alternative techniques and we very much welcome the opportunity to work in partnership to create tailor-made solutions to both simple and complex applications. Please do not hesitate to contact us to discuss your requirements.
The benefits of modular platform systems can be summarised as :

• Reduced system footprint
• Adaptable system configuration
• Reduced installation costs
• Easy and very fast component replacement