COMBI-FLOW Filters
General
Inherent to its construction, thermal Mass Flow Meters/Controllers for gases are sensitive to contamination. To increase the MTBF (Mean Time Between Failure) it is important to make sure that the gas entering the instrument is clean. The COMBI-FLOW filter provides this service. The filter element can be replaced without removing the base from the pipe.
Types of filters
Basically there are two types:
PVDF fine Filters
For semiconductor industrial applications with a verified retention rating at 0.003 mm smallest particle measured, and greater than 99.9999999% removal of all particles.
Sintered metal 316L Filters
For general purpose filtration.
Selection
- For semicon gases use PVDF fine filter; cartridge cannot be cleaned.
- For ultra-filtration use PVDF fine filter.
- For other applications use 316L sintered metal filters.
- In case of severe particle content in gas use pre-filter.
- 316L sintered metal cartridges may be cleaned with suitable solvent.
- In principle select finest porosity with low ΔP; preferably
ΔP not higher than 250 to 500 mbar, and porosity not bigger than 5 mm.
Available models
| Style |
Model no. |
Average porosity (mm) |
Pressure rating |
| Ultra -clean |
M0-AA |
0.05 |
10 bar |
| Low-flow |
M1-AB |
0.5 |
10 bar |
| |
M1-AC |
2.0 |
10 bar |
| |
M1-AD |
7.0 |
10 bar |
| |
M1-AE |
15.0 |
10 bar |
| 
